The only way to control contamination is to control the total environment. Air flow rates and direction, pressurization, temperature, humidity and specialized filtration all need to be tightly controlled. And the sources of these particles need to controlled or eliminated whenever possible. There is more to a clean room than air filters. Cleanrooms are planned and manufactured using strict protocol and methods. They are frequently found in electronics, pharmaceutical, biopharmaceutical, medical device industries and other critical manufacturing environments.
It only takes a quick monitor of the air in a cleanroom compared to a typical office building to see the difference. Typical office building air contains from 500,000 to 1,000,000 particles (0.5 microns or larger) per cubic foot of air. A Class 100 cleanroom is designed to never allow more than 100 particles (0.5 microns or larger) per cubic foot of air. Class 1000 and Class 10,000 cleanrooms are designed to limit particles to 1000 and 10,000 respectively.
A human hair is about 75-100 microns in diameter. A particle 200 times smaller (0.5 micron) than the human hair can cause major disaster in a cleanroom. Contamination can lead to expensive downtime and increased production costs. In fact, the billion dollar NASA Hubble Space Telescope was damaged and did not perform as designed because of a particle smaller than 0.5 microns.
Once a cleanroom is built it must be maintained and cleaned to the same high standards. This handbook has been prepared to give professional cleaning staff information about how to clean the cleanroom.
Contamination is a process or act that causes materials or surfaces to be soiled with contaminating substances. There are two broad categories of surface contaminants: film type and particulates. These contaminants can produce a “killer defect” in a miniature circuit. Film contaminants of only 10 nm (nanometers) can drastically reduce coating adhesion on a wafer or chip. It is widely accepted that particles of 0.5 microns or larger are the target. However, some industries are now targeting smaller particles.
A partial list of contaminants is found below. Any of these can be the source for killing a circuit. Preventing these contaminants from entering the cleanroom environment is the objective. It requires a commitment by everyone entering the cleanroom to make it happen. Professional cleaning personnel need to be aware of the importance of controlling contaminants. Strict procedures should be followed whenever entering or cleaning a cleanroom. Compromise is not acceptable when cleaning in a cleanroom.
Sources of Contamination
This is a partial list of some of the commonly known contaminants that can cause problems in some cleanroom environments. It has been found that many of these contaminants are generated from five basic sources. The facilities, people, tools, fluids and the product being manufactured can all contribute to contamination. Review this list to gain a better understanding of where contamination originates.
1. Facilities
Walls, floors and ceilings
Paint and coatings
Construction material (sheet rock, saw dust etc.)
Air conditioning debris
Room air and vapors
Spills and leaks
2. People
Skin flakes and oil
Cosmetics and perfume
Spittle
Clothing debris (lint, fibers etc.)
Hair
3. Tool Generated
Friction and wear particles
Lubricants and emissions
Vibrations
Brooms, mops and dusters
4. Fluids
Particulates floating in air
Bacteria, organics and moisture
Floor finishes or coatings
Cleaning chemicals
Plasticizers (outgasses)
Deionized water
5. Product generated
Silicon chips
Quartz flakes
Cleanroom debris
Aluminum particles
Key Elements of Contamination Control
HEPA (High Efficiency Particulate Air Filter) - These filters are extremely important for maintaining contamination control. They filter particles as small as 0.3 microns with a 99.97% minimum particle-collective efficiency.
CLEANROOM ARCHITECTURE - Cleanrooms are designed to achieve and maintain a airflow in which essentially the entire body of air within a confined area moves with uniform velocity along parellel flow lines. This air flow is called laminar flow. The more restriction of air flow the more turbulence. Turbulence can cause particle movement.
FILTRATION - In addition to the HEPA filters commonly used in cleanrooms, there are a number of other filtration mechanisms used to remove particles from gases and liquids. These filters are essential for providing effective contamination control.
CLEANING - Cleaning is an essential element of contamination control. Decisions need to made about the details of cleanroom maintenance and cleaning. Applications and procedures need to be written and agreed upon by cleanroom management and contractors (if used). There are many problems associated with cleaning. Managers need to answer the following questions before proceeding with any cleanroom cleaning program:
1. What is clean?
2. How is clean measured?
3. What cleaning materials can be used in the cleanroom?
4. When can the cleanroom be cleaned?
5. How frequent does it need to be cleaned?
CLEANROOM GARMENTS - The requirements for cleanroom garments will vary from location to location. It is important to know the local garment requirements of the cleanroom management. Gloves, face masks and head covers are standard in nearly every cleanroom environment. Smocks are being used more and more. Jump suits are required in very clean environments.
1. Body Regenerative Processes-- Skin flakes, oils, perspiration and hair.
2. Behavior-- Rate of movement, sneezing and coughing.
3. Attitude-- Work habits and communciation between workers.
| PEOPLE ACTIVITY | PARTICLES/MINUTE (0.3 microns and larger |
| Motionless (Standing or Seated) | 100,000 |
| Walking about 2 mph | 5,000,000 |
| Walking about 3.5 mph | 7,000,000 |
| Walking about 5 mph | 10,000,000 |
| Horseplay | 100,000,000 |
COMMODITIES - Care is taken when selecting and using commodity items in cleanrooms. Wipers, cleanroom paper and pencils and other supplies that service the cleanroom should be carefully screened and selected. Review of the local cleanroom requirements for approving and taking these items into the cleanroom are essential. In fact, many cleanroom managers will have approval lists of these types of items.
COSMETICS - Many cosmetics contain sodium, magnesium, silicon, calcium, potassium or iron. These chemicals can create damaging particles. Cleanroom managers may ban or restrict cosmetics in the cleanroom. This is usually dependent upon the threat to the product being made in the cleanroom. A recent mirror on a space telescope was fogged up from the cologne that was present in the cleanroom.
Cleaning Procedures for Clean Rooms
Cleaning Procedures for a Class 10,000 Cleanroom
List of Some of Equipment and Supplies Needed to Clean the Cleanroom
(All supplies must meet the Class 10,000 minimum requirements)
1. Cleaning and disinfecting solutions
2. Cleanroom mops
3. Cleanroom vacuum cleaner (if allowed)
4. Cleanroom wipers
5. Cleanroom mop bucket and wringer
List of Cleaning Tasks to be Completed in the Cleanroom
(Frequency may vary depending upon local requirements)
1. Cleaning of all work surfaces in the controlled environment.
2. Vacuuming (if allowed) of the floors and work surfaces.
3. Emptying of appropriate trash and waste.
4. Cleaning of the doors, door frames and lockers in the pre-staging area and gowning areas using the approved cleaning solution.
5. Mop gowning and cleanroom floors.
Cleaning Procedures for a Class 1000 Cleanroom
Below is a sample of a cleaning program in a Class 1000 Cleanroom. This is only a sample of a program. Local standards and requirements must be followed.
| Area | Description of Work | Frequency |
| 101 | Change tacky mats | Every 2 hours |
| 102 | Wet mop with approved mop, cleaner & DI water | 2 times per shift |
| 103 | Dust mop (if allowed) | 2 times per shift |
| 104 | Remove trash, sweep, mop with appropriate cleaner wipe down tables and coffee area, clean walls and recycle cans | 1 time per shift |
| 105 | Vacuum entry mats, sweep and mop floors | 1 time per shift |
| 106 | Mop floor with pre-burnish cleaner and tap water | 1 time per shift |
| 107 | Remove trash. Always wear gloves. Never take waste containers inside cleanrooms. | 1 time per shift |
| 108 | Wet mop floors | 1 time per shift |
| 109 | Remove acid and solvent trash | 1 time per shift |
| 110 | Clean and replenish dispenser in all restrooms | 3 times per week |
| 111 | Vacuum floor (if allowed) | 2 times per week |
| 112 | Clean stainless steel pass throughs with s/s cleaner | 1 time per week |
The list above is a sample of some of the common tasks that need to be performed in a Class 1000 cleanroom. The list is not exhaustive. But gives some ideas of how to prepare work schedules and procedures. An assessment of the cleanroom in conjunction with cleanroom management will help define these tasks and frequencies.
Cleaning Procedures for a Class 100 Cleanroom
| Zone | Procedure | Frequency |
| Zone 1a | Trash removal | Once daily |
| Mop walkways | Once a week | |
| Wipe down horizontal surfaces | Once monthly | |
| Zone 1b | Pull tacky mats | Every 2 hours |
| Zone 1c | Mop and trash removal | Once daily |
| Wipe down walls and trim | Once a week | |
| Zone 1d | Mop and trash removal | Once daily |
| Wipe walls and trim | Once a week | |
| Zone 2a | Mop | Twice a shift |
| Wipe walls and trim | Once a week | |
| Vacuum | Once monthly | |
| Zone 2b | Mop and trash removal | Once per shift |
| Zone 2c | Wipe down walls, windows, doors, trim, showers, | Once a week |
The list above is a sample of some of the common tasks that need to be performed in a Class 100 cleanroom. The list is not exhaustive. But gives some ideas of how to prepare work schedules and procedures. An assessment of the cleanroom in conjunction with cleanroom management will help define these tasks and frequencies.
General Cleanroom Regulations
Below is a list of general regulations recommended as a minimum for the successful operation of a cleanroom. All professional cleaning personnel should be aware and follow these regulations at all times.
1. All personal items such as keys, watches, rings, matches, lighters and cigarettes should be stored in the personal locker outside the gowning room.
2. Valuable personal Items such as wallets may be permitted in the cleanroom provided they are NEVER removed from beneath the cleanroom garments.
3. NO eating, smoking or gum chewing allowed inside the cleanroom.
4. Only garments approved for the cleanroom should be worn when entering.
5. NO cosmetics shall be worn in the cleanrooms. This includes: rouge, lipstick, eye shadow, eyebrow pencil, mascara, eye liner, false eye lashes, fingernail polish, hair spray, mousse, or the heavy use of aerosols, after shaves and perfumes.
6. Only approved cleanroom paper shall be allowed in the cleanroom.
7. Approved ball point pens shall be the only writing tool used.
8. Use of paper or fabric towels are prohibited. Use of hand dryers equipped with HEPA filters are suggested.
9. Gloves or finger cots should not be allowed to touch any item or surface that has not been thoroughly cleaned.
10. Only approved gloves, finger cots (powder-free), pliers, tweezers should be used to
handle product. Finger prints can be a major source of contamination on some products.
11. Solvent contact with the bare skin should be avoided. They can remove skin oils and increase skin flaking.
12. Approved skin lotions or lanolin based soaps are sometimes allowed. These can reduce skin flaking.
13. All tools, containers and fixtures used in the cleaning process should be cleaned to the same degree as the cleanroom surfaces. All of these items are a source of contamination.
14. NO tool should be allowed to rest on the surface of a bench or table. It should be place on a cleanroom wiper.
15. Only cleanroom approved wipers are allowed to be used. The wipers must be approved for the Class of cleanroom being cleaned.
16. ALL equipment, materials and containers introduced into a sterile facility must be subjected to stringent sterilization prior to entrance.
17. NO ONE who is physically ill, especially with respiratory or stomach disorders, may enter a sterile room. This is a good practice in any cleanroom environment.
1. Fast motions such as running, walking fast or horseplay.
2. Sitting or leaning on equipment or work surfaces.
3. Writing on equipment or garments.
4. Removal of items from beneath the cleanroom garments.
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